Fourier Ptychography-Based Measurement of Beam Divergence Angle for Vertical Cavity Surface-Emitting Laser

The Vertical Cavity Surface-Emitting Laser (VCSEL) has led to the rapid development of advanced fields such as communication, optical sensing, smart cars, and more. accurate testing VCSEL beam quality is an important prerequisite for its effective application. In this paper, a method measuring divergence angle far field spot based on transmissive Fourier ptychography proposed. First, single CCD multi-angle far-field acquisition system designed. Second, proposed ptychographic algorithm with synchronous optimization embedded transfer function, resolution-enhanced phase image reconstructed boundary extracted by Sobel operator defined position waist. way, waist radius laser calculated. Finally, measured via Compared traditional Gaussian definition method, in paper higher accuracy measurement. experimental results show that can improve measurement up 9.7%.